Chemistry of Atomic Layer Deposition

by Barry, Seán Thomas
ISBN: 9783110712513
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Overview

This book will help chemists and non-chemists alike understand the fundamentals of precursor design, and how these precursors drive the processes of atomic layer deposition. The underlying principle in atomic layer deposition relies on the chemistry of a precursor with a surface. But what makes a good precursor? How does a precursor's reaction at a surface allow it such phenomenal and exploitable characteristics? How do you design a precursor?

  • Format: Trade Paperback
  • Author: Barry, Seán Thomas
  • ISBN: 9783110712513
  • Condition: New
  • Dimensions: 9.45 x 0.24
  • Number Of Pages: 113
  • Publication Year: 2021
Language: English